Abstract:Micro-Electro-Mechanical System(MEMS)resonators are widely used in various MEMS sensors due to their frequency output characteristics. In order to improve the stability of the resonant working state, the closed-loop control method to realize the electrostatic drive and detection of MEMS resonators is generally used. This article researches three mainstream closed-loop driving methods for MEMS resonators, namely, giving the theoretical analysis and simulation modeling of non-automatic gain control, DC automatic gain control, and AC automatic gain control methods. The simulation model is built to compare the response speed and amplitude stabilization effect of three closed-loop drive control methods, and the advantages and disadvantages of each method are summarized. The results showed that the closed-loop driving method without automatic gain control has a simple structure, and introduces fewer noise sources, but it has no stabilizing effect, which can easily cause nonlinear vibration of the resonator; The DC-AC automatic gain control method and the AC automatic gain control method have fast response speed and good amplitude stabilization effect. The DC-AC automatic gain control method has good stability and high power consumption, which is not conducive to the development of low power consumption and miniaturization. The AC automatic gain control method has a simple structure, but the gain module can cause the noise signal to be amplified, which is not conducive to improving the signal-to-noise ratio. The research in this article provides specific guidance for future closed-loop drive control methods for specific resonators.