Abstract:The microdisk resonator gyroscope with navigation level potential is the most popular kind of micromachine gyroscope in international research. On this basis, we designed a micro cobweb-like disk resonator gyroscope with small frequency splitting. Modal analysis and impact analysis were conducted using finite element simulation software. The simulation results showed that the minimum frequency difference between the working mode and the parasitic mode of the micro cobweb-like disk resonator gyroscope was 3.9 kHz, and the impact load acceleration it can withstand was up to 25000g. In addition, simulation analysis was conducted on the influence of structural errors such as crystal orientation error and process error on frequency splitting. The results showed that it had lower structural error sensitivity than the circular disk resonator gyroscope in frequency splitting. In summary, this structure can effectively suppress parasitic mode interference, and has strong impact resistance and good structural error robustness, with preferably development foreground.