Abstract:Quartz glass with many excellent physical and chemical properties such as corrosion resistance and low thermal expansion coefficient is widely used in high-performance optical systems. The components are required to have nano-level surface roughness without damage and residual stress. Therefore, the ultra-precision polishing process after finishing is particularly important. This article introduces several precision polishing methods of quartz glass such as bonnet polishing, magnetorheological finishing, elastic emission machining, ion beam machining, etc., and focuses on the plasma polishing technology domestic and overseas, including plasma assisted chemical etching, plasma jet machining, plasma chemical vaporization machining. An overview of the future development of plasma is also presented.