Abstract:We report using metasurface absorbers, that is, optical resonator arrays with sub-wavelength sizes and spacings, to replace discrete filters and polarizers to achieve simultaneous selection of spectrum and polarization for Vanadium oxide (VOx) microbolometers. The metasurface absorber selectively absorbs TM polarized light in a specific band and reflects TE polarized light, in which the center wavelength and bandwidth of the specific band can be artificially adjusted. The metasurface absorbers are designed and prepared for the two infrared bands of 5.3μm ~ 6.6μm and 6μm ~ 7.4μm, respectively. The absorption rates of the prepared metasurface absorbers to TM polarized light are 0.8322 and 0.7720, respectively, and the polarization extinction ratios are 42.24 and 42.65, respectively. The metasurface absorber is integrated with the vanadium oxide microbolometer, and the measured detector response spectrum is in good agreement with the absorption spectrum of the metasurface absorber. The peak responsivity of the two detectors is 1.0 V/W and 1.46 V/W, which are located at 6.0 μm and 6.8 μm, respectively. At the same time, the peak detection rates of the two detectors are 6.94 × 105 cm · Hz1/2W-1 and 9.95 × 105 cm · Hz1/2W-1, respectively, and the operating frequencies are 11 Hz and 36 Hz, respectively. Our work provides a new method for realizing large-array room-temperature multi-spectral polarization imaging detectors.