Abstract:A novel adaptive self-calibrated multistage-noise-shaping (MASH) electro mechanical sigma-delta modulator sensing scheme for MEMS Coriolis gyroscope is introduced in this paper. The proposed system adopts an online adaptive MASH2-0 modulator for a MEMS tuning-fork gyroscope without using any additional mechanical calibration methods. The quantization errors that leak through at the output due to parameters mismatching between the gyroscope sensing element imperfections and the interface digital modulator are effectively removed. The correction of spectral distortion and gain mismatch in the signal path due to non-ideal signal transfer function is also allowed. The results demonstrate that the proposed adaptive MASH2-0 gyroscope achieves inherent system stability, better dynamic range and better noise performance compared with a common 4th-order single-loop EM-??? gyroscope.