多环谐振微陀螺性能参数的有限元计算

卢浩琳; 张卫平; 谷留涛; 冯军

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中文摘要: 多环谐振陀螺是目前最具发展前景的MEMS陀螺之一，如何快速对多环谐振陀螺进行参数优化设计成为研究热点。本文在多环谐振陀螺的基本结构的基础上，通过理论研究，发现机械灵敏度和机械热噪声的主要结构影响参数为陀螺的谐振频率、有效质量、角度增益以及品质因子。并使用COMSOL 和 MATLAB 等软件搭建了有限元计算平台，实现了对上述性能参数的有限元仿真求解，为研究环形谐振陀螺结构的性能参数和优化设计提供了有力的软件仿真工具，并且可以推广应用到研究其他陀螺器件中。

中文关键词: 多环谐振微陀螺仪有限元（FEM）谐振频率角度增益有效质量

Abstract:Disk resonator gyroscope (DRG) is one of the most promising MEMS gyroscopes. How to quickly optimize the parameters of DRG has become a research hotspot. In this paper, based on the basic structure of the DRG and theoretical research, it is found that the main structural influence parameters of mechanical sensitivity and mechanical thermal noise are the resonant frequency, effective mass, angular gain and quality factor of the gyroscope. The finite element calculation platform is built by using COMSOL and MATLAB software to realize the finite element simulation of the above performance parameters, which provides a powerful software simulation tool for the research of performance parameters and optimization design of DRG and the simulation methods can be widely used on other gyroscope devices.

keywords: disk resonator gyroscope, finite element method（FEM）, resonant frequency, angle gain, effective quality

文章编号：20220410 中图分类号：U666.1 文献标志码：A

基金项目:国家自然科学基金项目(61574093);国家重点实验室基金(614280504010317);上海市专业技术服务平台资助(19DZ2291103);上海航天技术研究院-上海交大航天先进技术联合研究中心自主项目(USCAST2016-5)

作者	单位
卢浩琳	上海交通大学微米纳米加工技术国家级重点实验室；上海交通大学电子信息与电气工程学院微纳电子学系
张卫平	上海交通大学微米纳米加工技术国家级重点实验室；上海交通大学电子信息与电气工程学院微纳电子学系
谷留涛	上海交通大学微米纳米加工技术国家级重点实验室；上海交通大学电子信息与电气工程学院微纳电子学系
冯军	上海交通大学微米纳米加工技术国家级重点实验室；上海交通大学电子信息与电气工程学院微纳电子学系

Author Name	Affiliation
LU Haolin	National Key Laboratory of Science and Technology on Micro/Nano Fabrication,Shanghai Jiao Tong University School of Electronic and Electrical Engineering Department of Micro/Nano Electronics,Shanghai Jiao Tong University
ZHANG Weiping	National Key Laboratory of Science and Technology on Micro/Nano Fabrication,Shanghai Jiao Tong University School of Electronic and Electrical Engineering Department of Micro/Nano Electronics,Shanghai Jiao Tong University
GU Liutao	National Key Laboratory of Science and Technology on Micro/Nano Fabrication,Shanghai Jiao Tong University School of Electronic and Electrical Engineering Department of Micro/Nano Electronics,Shanghai Jiao Tong University
FENG Jun	National Key Laboratory of Science and Technology on Micro/Nano Fabrication,Shanghai Jiao Tong University School of Electronic and Electrical Engineering Department of Micro/Nano Electronics,Shanghai Jiao Tong University

引用文本：
卢浩琳,张卫平,谷留涛,冯军.多环谐振微陀螺性能参数的有限元计算[J].飞控与探测,2022,(4):76-81.