Abstract:Out-of-plane axial detection accelerometer (Z-axis MEMS accelerometer) is an important device used to provide out-of-plane acceleration in a micro-inertial system. Firstly, two typical structures of Z-axis accelerometer are introduced, and the research results of domestic and foreign research institutions in recent years are listed. The characteristics of Z-axis accelerometer in structural design, process manufacturing, performance index and three-axis monolithic integration are summarized. Finally, combined with the recent research status of the Z-axis MEMS accelerometer, the development in the direction of size optimization, performance optimization, process progress, monolithic three-axis integration, etc. is prospected.