Abstract:The hemispherical resonator is the core component of the hemispherical resonant gyroscope, and its quality directly determines the performance and accuracy of the gyroscope. The hemispherical resonator made of high purity quartz material has been widely recognized in the industry, but it is difficult to process. The hemispherical bare oscillator is the incomplete machined state of the hemispherical harmonic oscillator. The residual stress on the machined surface determines the resonant Q value, frequency difference Δ f and other parameters, and then affects the resonant performance. In this paper, the technical methods and characteristics of micro-stress manufacturing of quartz hemispherical bare oscillator are analyzed and discussed, and femtosecond laser processing equipment is used to realize micro-stress manufacturing of quartz hemispherical bare oscillator. Femtosecond laser processing has the advantages of high speed, small thermal deformation, non-contact, micro-stress and so on. The processing efficiency, cost and surface stress state of hemispherical harmonic oscillator can be obviously improved. Femtosecond laser processing provides a new way for the processing of high-precision quartz hemispherical bare vibrators.