Abstract:To overcome the dependence of resonant frequency on temperature arriving from silicon, we propose an oscillator of a ring vibration gyroscope based on glass. By introducing micro-electro-mechanical system (MEMS) processing technology, including deep silicon etching, anodic bonding process, chemical mechanical polishing and glass melting process, to the fabrication of the oscillator, we achieve a novel technology with high precision and high efficiency. It is suitable for mass manufacturing of micro three dimensional (3D) structures.