Abstract:In view of the performance deterioration of MEMS gyroscopes and modules caused by mechanical inputs such as vibration, shock and overload during operation, the research progress of the mechanical environment adaptability technology for MEMS gyroscopes and modules abroad is presented. From the levels of sensors, packages, and devices/systems, as well as design, fabrication, packaging and integration, the mainstream technologies and methods of mechanical environment adaptability abroad are introduced, which provide a reference for research of domestic related technologies.