Abstract:The fluoridated hybrid soft replica molds with different feature sizes and periods are fabricated with silicon master templates by UV nanoimprinting lithography (NIL). Compared with PDMS and other polymer materials, the photoresist used here possesses excellent properties, such as good mechanism strength, low surface energy and thermal stability. The replica molds are used as stamps in UV and thermal nanoimprinting process. The experimental results show that the transferred patterns on the substrates are agreed well with the master molds. The fabricated fluoridated hybrid replica molds are not only suitable for UV nanoimprinting, but also for thermal nanoimprinting, and the fabricated replica molds can also be used as photonics-based devices for sensing, imaging, detection, telecommunication and data storage and so on.